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Volume 1, Issue 2 |
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Designers of motion control systems in the semiconductor industry are consistently confronted with increasing demands for higher performance. It is mainly motivated by the desire to produce more semiconductors, faster, and at a lower cost.
One aspect of the semiconductor manufacturing process, inspection, usually involves positioning the silicon wafer relative to optical (or other) components by placing the wafer on a fast moving XY stage. Higher velocities and higher accelerations are typically required to increase the machine throughput. These are usually limited by the voltage and current limitations of the motors and drives. Nevertheless, an aggressive motion profile would not necessarily yield higher throughput. In many cases, the practical velocity and acceleration are reduced well below their maximum achievable values...
Explore more >>
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SpiiPlus LF - High Performance Motion Controller at an
Economical Price |
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The SPiiPlus-LF 4-axis controller is designed to address the needs of cost sensitive applications where space is at a premium. The SPiiPlus-LF is more than just a motion controller; with its PLC programming and CANOpen master capabilities it can actually control your whole machine.
The SPiiPlus-LF is PLCopen compliant, in addition to ACSPL+ motion programming language, it can be programmed in any of the five IEC61131-3 standard PLC languages. Its capabilities can be extended by adding up to 64 CANopen nodes of additional axes and I/Os. Ideal applications include bio-medical, lab automation, and desktop tools.
Click here for additional product features and options >>
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New 3U-HP Motion
Controller - Sophistication, Precision and Speed |
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Able to provide a faster controller cycle of up to 4kHz, the high performance 3U-HP Series motion controller is ACS' new RoHS compliant, advanced version of their SpiiPlus 3U. Ideal for complex and demanding applications, including semiconductor manufacturing, wafer inspection and flat panel display assembly and testing, the rack-mounted
3U-HP Series can provide control for up to 8 axes of motion control.
The 3U-HP Series is ideal for gantry applications requiring the following features:
• 2.5MHz Sin-Cos encoder
• Customized (Gantry or other) control algorithms
• Input shaping for reducing move and settling time
• CANOpen network
• Ease of use
• Sub-nanometer resolution and high speed without compromising accuracy.
Read more>>
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| Precision Stencil Laser Cutter |
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For high performance stencil laser cutting involving gantry systems, your motion control system needs to eliminate problems concerning perpendicular adjustment, error measurement, error cross compensation, synchronous control of 2 moving coils of
Y-axis and X-axis installation. The ACS SpiiPlus PCI multi-axis motion controller helps this stencil laser cutting machine comprised of three linear motors, achieve optimum
cutting quality without compromising speed and accuracy.
The ACS SpiiPlus PCI integrates with any gantry system to achieve smooth motion, even under stringent speed and acceleration/ deceleration demands. Capabilities include:
• Cross-axis compensation
• 20kHz servo update rate
• CPU and DSP controllers to support advanced control algorithms
• Sub-nanometer resolution
Read the complete application story>>
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