Optimize Motion System Performance for Nanometer Resolution Applications
High-end Semiconductor, FPD, and Optics inspection and processing equipment demand nanometer-level motion control positioning. Despite their low power efficiency, linear amplifiers have traditionally been used instead of PWM amplifiers for such applications because of their achievable dynamic range and a high degree of linearity. A better solution is required for the latest generation equipment employing larger and more powerful motion stages to meet increasing throughput demands. ACS’ proprietary NanoPWM technology combines the advantages of linear and PWM amplifiers to provide nanometer-level positioning to OEM machine builders using large-format high-precision motion systems.