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semiconductor manufacturing
Semiconductor Manufacturing

ACS Motion Control has decades of experience addressing the throughput, accuracy, and resolution requirements of the most demanding semiconductor equipment applications, including inspection, metrology, lithography, and more. Advanced development tools and capabilities are critical in enabling semiconductor OEM machine builders to manage highly complex motion control applications.


Key Application Expertise

  • High-Precision XY Stage Wafer/Mask Positioning
  • High-Precision Z Stage Inspection/Metrology Head Positioning
  • Z/Tip/Tilt Wafer Alignment
  • Beam Manipulation Axes Positioning
  • Optical, X-Ray, and E-Beam Inspection and Metrology
  • Lithography
  • Probing
  • Film Deposition


Key Capabilities

Technical Resources

Additional Links and Downloads

Semiconductor Manufacturing Equipment Brochure

Nanometer Resolution E-Beam Wafer Inspection

The MMI software is versatile and user-friendly for both development and field engineering. Tech support is timely, responsive, and effective. ACS has excellent knowledge of motion control engineering and is able and willing to customize for special applications. It enables us to have the most advanced control solution to meet our special needs.