1,2 drives, 12-100V, up to 13.3/40A


EtherCAT® Single/Dual Axis NanoPWM Drive Module      

  • Powerful & Smart EtherCAT Drive Module
    Two drives per module for Gantry control
    Voltage: 12Vdc – 100Vdc
    Current: Up to 13.3A / 40A (cont./peak)
  • The Ultimate Drive for Demanding Positioning Applications
    Sub-nanometer standstill jitter
    Nanometer tracking error and optimal velocity
  • A Lower Cost of Ownership Alternative to Linear Drives
    Lower heat dissipation
    Better reliability
    Significantly smaller
    Simpler supply requirements
    Digitally controlled and easy setup
  • Uncompromised speed and resolution
    Up to 4 Analog Sin-Cos 1Vptp encoders with frequency up to 10MHz
    Encoder multiplication of 4 to 65,536
    Automatic encoder compensation and error detection
    Dual feedback support
    Two squared Sin-Cos
    Position feed forward for active vibration isolation
    Optional internal relays for dynamic braking (shorting
    motor phases)
  • Smart Motion related I/O
    Digital I/O
    • Inputs: 4 encoder registration MARK / general purpose
    • Outputs: 2 Position Event Generators, 2 motor brake /
      general purpose
  • Analog I/O
    • Inputs: 4, 12 bit resolution, +/-10V
    • Outputs: 4, 16 bit resolution, +/-10V

The NPMPM is a line of the most advanced servo drives available today.

It is specifically designed to address the most demanding applications with regards to move and settle times, standstill
jitter, and velocity smoothness, such as wafer metrology and inspection, FPD inspection, and ultra-precision machining
for processing of optical components.
It is based on the proprietary and unique   technology that exceeds stand still jitter and
tracking error performance that until now has been achieved only with linear drives, with reduced cost of ownership.

With the optional combination of a 10MHz laser encoder interface and the powerful  algorithm, demanding
sub-nanometer resolution positioning systems can achieve ultimate throughput and accuracy with minimal sensitivity to
disturbances and stage to stage manufacturing differences.

The NPMPM is a slave that runs under any ACS EtherCAT masters.
A comprehensive set of software support tools are provided for module configuration, setup and tuning.


CE, UL (Pending)

EtherCAT® is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.



Per Axis A B C D
Continuous/Peak current
Sine amplitude [A]
3.3/10 6.6/20 10/30 13.3/40
Continuous/Peak current [Arms] 2.3/7 4.6/14.1 7/21.2 9.4/28.2
Maximum cont. Input current [Arms] 2.6 5.3 8 10.6
Maximum heat dissipation [W] 7+0.9x
(no. of
(no. of
(no. of
(no. of
Maximum cont./peak output
power @ 100Vdc [W]
260/780 520/1560 790/2340 1050/3120
Peak current time [sec] 1
Minimum load inductance
@100Vdc [mH]. Can be derated
linearily for lower voltages
Per Module
Control voltage input [Vdc] 24 ±10%
Drive voltage input range [Vdc] 12 – 100 (96 recommended)
Maximum output voltage [Vdc] (Vin motor) x 88%
Maximum cont. input current [Arms] 5.2 10.6 16 21.2



Type: digital current control with field oriented control and space vector modulation.
Current ripple frequency: 40 kHz.
Current loop sampling rate: 20 kHz.
Programmable Current loop bandwidth: up to 4kHz, will vary with tuning & load parameters.
Commutation type: sinusoidal. Initialization with or without hall sensors.
Switching method: advanced unipolar PWM.
Built-in motor phases shortening relays.
Protection: Over & under voltage, Over current, Over temperature, Phase to phase and phase to ground short (short circuit on one of the motor phases might damage the drive).



The module is fed by two power sources. A motor supply and a 24Vdc control supply.
During emergency conditions there is no need to remove the 24Vdc control supply.

Motor Drive Supply
Range: 12Vdc - 100Vdc, recommended: 12Vdc - 96Vdc.
Current rating should be calculated based on actual load.
If regen resistor is required, it should be added in parallel to motor supply with 102V shunt activation.

Control Supply
Range: 24Vdc ±10%
Maximum input current / power: 0.9A @21.6V/ 20W Without motor brakes.
With 2 motor brakes: 1.9A @ 21.6Vdc / 42W
Built-in motor phases shortening relays.
Protection: reverse polarity. A 4A external fuse must be used.


Motor Type

Two- and three-phase permanent magnet synchronous (DC brushless/AC servo), DC brush, Voice coil, Two- and three-phase stepper (micro-stepping open or closed loop).



Types: Incremental digital encoders (AqB), Hall inputs, analog Sin-Cos (optional), absolute encoders (optional).
Incremental Digital Encoder: Two per axis. A&B,I and Clk/Dir,
Type: Differential RS-422
Max. rate: 50 million quad counts/sec.
Protection: Encoder error, not connected
Sin-Cos Analog Encoder: Up to two per axis.
Type: 1Vptp, differential.
Programmable multiplication factor: x4 to x65,536.
Maximum frequency: 500kHz or 10MHz.
Maximum acceleration with Sin-Cos encoder: 108 sine periods/second2.
Squared Sin-Cos output: Two, differential RS422.
Absolute encoders (optional): Up to two. Smart-Abs, Panasonic, BiSS-A/B/C, SSI, Sanyo Denki.
Hall inputs: A set of three per axis.
Type: single-ended, 5V, source, open cathode. Input current: <7mA.
Feedback supplies: For all digital feedback devices: 5V, 0.5A.
For all analog feedback devices: 5V, 1.5A.


Digital I/O

For different I/O configurations see ordering options
Safety Inputs: Left and right limit inputs per axis
Type: 24V/ source (default), single ended, opto-isolated. Input current 4-14mA.
STO: Two inputs, 24V ±20%. Input current: <50mA
Registration MARK Inputs (High Speed Position Capture): Four. Fast, 24V±20%, opto-isolated, two terminals.
Input current 4-14mA.
Can be used as general purpose inputs.
General purpose output, Motor Mechanical Brake output: Two, 24V/source (default), single ended, opto-isolated, 0.1A
External Motor relay control: Two, 24V ±20%, source, 0.5A.
These outputs are used to shorten the phases of the motors by external
relays (if the optional internal relays are not present).
PEG (Position Event Generator): Two, Pulse or State, Differential, RS422.
Pulse width: 26nSec to 1.75mSec. Maximum rate: 10MHz.
Can be used as general purpose output.

Ananlog I/O

Analog Inputs: Four, ±10V, differential, 12 bit resolution.
Max. input frequency: 1KHz. Offset: < 30mV
Analog Outputs: Four, ±10V, differential, 16 bit resolution.
Offset: ±50mV, Bandwidth: 5KHz. Max. output load: 10KΩ,
Noise / Ripple: <40mV.


EtherCAT® Communication

Two ports, In and Out, RJ45 connector


Operating range: 0 to + 40°C
Storage and transportation range: -25 to +60°C
Humidity (operating range): 5% to 90% non-condensing



257x154.9x50.9 mm3



NPXpm-ACC1: Mating connectors kit
UDMmc&NPXpm-ACC2: (J1) mating 2m flying lead cable
STO-ACC1: 2 meter cable with flying leads

Ask our Experts